Wavelength 120-179 nm
126 | 130 | 149 | 157 | 172 nm

Ar2 F2

VUV / Excimer 120-179 nm

VAR
VAR
λ [nm]AR (0°); R < methodAR (45°); R < method
157 0.5% on Fluoride EBE 0.75% on Fluoride EBE
172 0.5% on Fluoride EBE 0.75% on Fluoride EBE
HR
HR
λ [nm]HR (0°); R > methodHR (45°); R > method
126 84% on Fluoride EBE 75% on Fluoride EBE
130 85% on Fluoride EBE 80% on Fluoride EBE
149 91% on Fluoride EBE 89% on Fluoride EBE
157 94% (goal 97%) on Fluoride EBE 93% (goal 95%) on Fluoride EBE
172 95% on Fluoride EBE 94% on Fluoride EBE
TFP
TFP
λ [nm] AOImethod
157 Rp<0.3%, Rs>87% 72° on CaF2 EBE
VA
VA
λ [nm]0°→ 45°; T = method
157 75% → 2% on CaF2 EBE
  10% → 70% on CaF2 EBE

LASEROPTIK has longtime experience with coatings in the Vacuum Ultraviolet (VUV) range (120-179 nm), especially for 157 nm including dedicated metrology.

The main reason for losses in this spectrum is absorption of water and hydrocarbons. VUV-CaF2 substrates are used to counter these losses. A surface roughness of σRMS < 0.3 nm helps to decrease the losses for all coatings.

We guarantee LIDT > 400 mJ/cm2 with 15 ns pul­ses for HR 157 nm /0°.

Our mirrors withstand 2.5 billion pulses at 10 mJ/cm2 without any detectable degradation as reported from a longterm test. The values for PR and AR coatings will be in the same range.

All values are given for standard coatings. Customized coatings available for all types.

Coating methods available:

EBE
AR 157 nm / 0°
[B-00768]AR 157 nm / 0°

157 nm: R < 0.5%

HR 157 nm / 0°
[B-00649]HR 157 nm / 0°

157 nm: R > 94% (goal R > 97%)

R 50% 157 nm / 45°
[B-06013]R 50% 157 nm / 45°

157 nm: R ± 5%

TFP 157 nm / 72°
[B-01280]TFP 157 nm / 72°

157 nm: Rp < 0.3%, Rs > 87%

VA 157 nm / 0-45° T 75-1%
[B-11719]VA 157 nm / 0-45° T 75-1%

157 nm: 0°: T > 70% (goal T > 75%);
45°: T < 2% (goal T < 1%)

Al + Protection Layer - VUV
[B-02250-01]Al + Protection Layer - VUV

120-220 nm /0°: R > 65%